KLA Profilometer
This tool allows one and two dimensional contact scanning of surfaces to reveal topographical variations for analysis of step heights and surface roughness.
Cost:
- Vertical range: 1 Å to 327 μm.
- Vertical resolution: .01 Å in the 13 µm range,
.04 Å in the 64 µm range, - Scan Length range: 150 mm maximum
- Maximum Sample dimensions: 150 mm of diameter and thickness up to 50 mm.
- Stage Positioning: Motorized and Programmable
- Sample Viewing: Color Camera
- Zoom Magnification: 40x to 160x
- Stylus (standard): Diamond, 2 µ radius
- Stylus Tracking Force: Programmable from 0.5 mg to 50 mg
- 3-D Feature: Capability for three-dimensional rendering of sample surface
A stylus is moved vertically in contact with a sample and then moved laterally across the sample for a specified distance and specified contact force. A profilometer can measure small surface variations in vertical stylus displacement as a function of position. A typical profilometer can measure small vertical features ranging in height from 1 nanometer to 1 millimeter. The height position of the diamond stylus generates an analog signal which is converted into a digital signal that is stored, analyzed and displayed. The radius of the diamond stylus is 2
