Equipment
Thin Film Deposition Tool

Model:
KLJ PVD-75 (Sputter only)
Capabilities:
Thin film sputter deposition tool, using RF or DC power.
Cost:
Calendar for Reservations:
Specifications:
- RF (insulating materials) or DC (conductive material) deposition.
- Support for substrates up to 8".
- Sapphire crystal thickness monitor.
- Substrate heating to 300C.
- Easy to use touchscreen interface.
Ions are accelerated towards the source material (3" target), ablating away material which is then deposited onto the substrate. This deposition cloud results in good sidewall coverage of substrate features.