Equipment
Clean Bench

Model:
Reynolds Tech RCA Bench
Capabilities:
Wet chemistry processing bench designed for industry standard RCA chemical cleaning.
Cost:
Calendar for Reservations:
Specifications:
- Heated, perminant chemistry baths designed for RCA clean (SC-1, HF Strip, SC-2).
- Built in N2 and DI water dispensers, including foot operated sink.
- Internal DI rinse tanks.
- Process timers.
On-line Manual:
A chemical safe workspace designed for safe processing of hazardous or noxious chemicals including acids, bases and organic solvents designed specifically for RCA cleaning. This consists of three steps - The first (SC-1, 10min @ 75C) consists of ammonium hydroxide, hydrogen peroxide and DI water designed to remove organic contamination. Next is a dilute hydroflouric acid strip (HF, 1min @ room temperature) to remove any native oxides that may be present. This is followed by the final step (SC-2, 10min @ 75C) a bath of hydrochloric acid, hydrogen peroxide and DI water designed to remove ionic contamination. Substrates recieve a minimum 5 minute DI water rinse after each bath. All appropriate Personal Protective Gear (P.P.E.) must be worn while working with this bench.